Electronic special gas is widely used in high-tech indu […]
Electronic special gas is widely used in high-tech industries such as semiconductors, microelectronics and related solar cells, or for thin film deposition, etching, doping, passivation, cleaning, or as carrier gas, protective atmosphere, etc.
As semiconductor and microelectronics technologies develop toward higher performance and higher integration, higher and higher demands are placed on the purity of electronic special gas, and the purification of electronic special gas is becoming more and more critical and important. At present, the domestic ultra-high purity purification technology mainly depends on imports, and its own technical level (6N) is far behind the international advanced level (8-9N). This project will design and develop a series of high-efficiency, high-capacity, high-selectivity, and low-cost new nano-purifiers, with more than 50 series on MO sources, inert gases, hydride gases, reactive gases, corrosive gases, etc. The terminal purification of electronic special gas improves the purity of electronic special gas from ppm level to ppb and ppt level, and minimizes the influence of special gas transmission and control system on gas purity, thereby greatly improving process capability and reducing product defects To increase the output of the manufacturing process to meet the needs of next-generation semiconductor, microelectronics and related high-tech development. This project will form an ultra-high-purity electronic special gas purification technology with independent intellectual property rights to solve the localization of the ultra-high-purity electronic special gas purification core technology.
More info: https://www.kimtae-chem.com/